Isolast (Isolast) PureFab® FFKM
Maximizing the operating time of advanced semiconductor manufacturing processes.
Isolast PureFab, developed for harsh semiconductor manufacturing processes, is a sealing material that achieves the highest level of purity. Trelleborg Sealing Solutions has developed the highest level of materials in the Isolast PureFab series for harsh semiconductor manufacturing processes. By using these perfluoroelastomer (FFKM) materials, it is possible to improve the yield of semiconductor manufacturing processes and reduce process defects. As a result, downtime is minimized, maintenance cycles are extended, and the operating time of process tools is improved, enhancing the total cost of ownership (TCO). All semiconductor materials in the "PureFab" line possess excellent mechanical properties while achieving the highest level of purity without compromising plasma resistance, outgassing, or thermal stability. Each material exhibits the highest level of characteristics in its individual grade.
- Company：日本トレルボルグ シーリング ソリューションズ
- Price：Other
